Our proposed research is organized in two thrusts. Thrust 1 focuses on the design of reliable con-tacting MEMS. Thrust 2 is concerned with the design of reliable non-contact MEMS actuators and bio-functional surfaces. The specific objectives and proposed research activities in the two thrusts are as follows:

Thrust 1

The objectives of this thrust are to:

A ) Develop improved understanding of the fundamental science and governing principles operating in contacting MEMS/NEMS devices and their impact on performance and reliability.

B) Implement these advancements into physics-based models, which emulate the underlying principles of these devices in a compact and efficient manner, and allow extrapolation of performance and lifetime improvements based upon them

C) Build and test representative structures such as, switches, phase shifters, and antenna su-barrays, which validate the physics and models. In future years, demonstrate model validation and design methodologies using a complex, heterogeneously integrated microsystems.

Thrust 2

The objectives of this thrust are to:

A) Develop improved understanding of the fundamental science and principles that govern the operation of non-contacting electro-static, electro-thermal, and bio-functional MEMS/NEMS actuators, and their impact on performance and reliability.

B) Implement these advancements into physics-based models which emulate the underlying principles of these devices in a compact and efficient manner, and allow extrapolation of performance and lifetime improvements based upon them.

C) Validate these models and demonstrate their utilization in appropriate CAD environments for RF front-end, high temperature sensor, and/or biological-sensor microsystems