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| Thrust 2: Physics of Failure of Non-Contacting,
Large Displacement MEMs/NEMs Acuators |
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- Develop an improved understanding of the fundamental
science governing the operation of of non-contacting, large displacement
MEMs/NEMs Acuators.
- Implement this understanding into multi-physics,
stochastic models that emulate the underlying principles, account for
impact of fabrication process induced variations and uncertanties in
geometric and material parameters on device performance.
- Reduce these models to fast behavioral macro-models
suitable for expediant design iteration and predictive assessment of
performance degradation and lifetime reliability.
- Validate both the physics and resulting models using
test structures and specific MEMs acuators.
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