A unified, macroscopic, one-dimensional
model is presented for the quantitative description of the process of
dielectric charging in RF MEMS switches. The fidelity of the model relies
upon the utilization of experimentally-obtained data to assign values
to model parameters that capture the non-linear behavior of the dielectric
charging process. The proposed model can be easily cast in the form a
simple SPICE circuit. Its compact,physics-based form enables its seamless
insertion in non-linear, SPICE-like, circuit simulators and makes it compatible
with system-level MEMS computer-aided analysis and design tools. The model
enables the efficient simulation of dielectric charging
under different, complex control voltage waveforms. In addition, it provides
the means for expedient simulation of the impact of dielectric charging
on switch performance degradation.
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