UIUC’s structural material characterization and testing facilities are comprised of two properly conditioned laboratories for Atomic Force Microscopy (AFM) work, one laboratory located at the Department of Aerospace Engineering and the other at the Beckman Institute at UIUC. These facilities include two complete metrological Scanning Probe Microscope (SPM) systems with capabilities for metrology, contact, non-contact and intermittent AFM, phase imaging, force modulation AFM, in-liquid AFM, scanning thermal microscopy, scanning electric potential AFM, magnetic force microscopy, nanolithography, and nano-manipulation. Both AFM systems are outfitted with closed-loop hardware to track the motion of the piezoelectric actuators and continuously correct for scanner nonlinearities. Three AFM scanner heads for 100x100 micron, 80x80 micron, and 80x80 micron (with integrated scanning potential probe) maximum scan sizes are available for this work. Both AFMs are enclosed in thermal isolation chambers to eliminate temperature fluctuations. A computer controlled heating stage specially designed for AFM is available to conduct real time heating and imaging. The accuracy is ~1°C. In addition, NMRL has three custom-made piezo-electrically driven and computer controlled microtesting appara-tuses integrated with the AFMs described above. This instrumentation is used to determine the constitutive properties, fracture toughness, determination of thin film fatigue life and strength of MEMS materials. One of these microtension testers is designed for high frequency fatigue testing of MEMS. Finally, a mechanical testing system for characterization of MEMS and small scale specimens at low and moderate temperatures (-150°C to 315°C), and at elevated temperatures (up to 900°C) is also available. This mechanical testing apparatus can also be used with an Atomic Force Microscope (AFM) at the PI’s laboratory for room temperature nanoscale mechanical deformation measurements. The computational work at UIUC will be conducted in the Computational Multiscale Nanosystems Group (CMNG) within the Molecular and Electronic Nanostructures Research Theme at the Beckman Institute for Advanced Science and Technology. The CMNG group is equipped with several personal computers, high-end computers and several clusters.