A unified, macroscopic, one-dimensional
model is presented for the quantitative description of the process of
dielectric charging in RF MEMS switch. The models provides for the direct
incorporation of various physical factors known to impact dielectric charging,
such as surface roughness, material inhomogeneity and electric field-dependent
conduction in the dielectric. The values of the various parameters used
in the model are extracted from experimental data. The proposed model
serves as a generalization of various earlier models reported in the
literature for the quantitative description of dielectric charging.
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